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ALD Machine

Our ALD (Atomic Layer Deposition) equipment plays a crucial role in semiconductors, optics, MEMS, and photovoltaics, delivering ultra-uniform, high-conformality thin films with atomic-level thickness control.

It ensures precise and defect-free coatings even on complex 3D structures, deep trenches, and high-aspect-ratio components, making it an ideal solution for next-generation technology.

Atomic layer deposition (ALD) Equipment​

How does ALD work?

ALD is a type of CVD technology. It alternately introduces different chemical vapor precursors, conducts self-limiting chemical reactions on the substrate surface, and finally deposits thin films layer by layer, ensuring precise thickness control.

  • Precise Thickness Control
    You can think of the process as "adding a blanket one layer at a time," where each cycle deposits a single atomic layer, allowing precise control over film thickness during deposition.

  • Highly Uniform & Conformality
    This step-by-step growth enables ALD to form highly uniform films on complex or high aspect ratios structures, preventing excessive accumulation and ensuring complete coverage in every corner.

  • TALD & PEALD Available

TALD uses thermal sources to heat precursor gases for atomic layer deposition, is suitable for high-temperature deposition. PEALD, on the other hand, uses plasma to excite precursor gases, allowing deposition at lower temperatures, more suitable for temperature-sensitive materials.

Find Your Best ALD Solution

Types of Thin Films That ALD Deposit

Optical Coating

Anti-reflection film (no ghost or glare), high reflective film(T < 0.1%), lens protective layer, grating device / curved surface coating

Photovoltaic

Passivation layer, transparent conductive layer, water vapor barrier layer, electron transport layer, hole transport layer, etc.

Semiconductor

Chip passivation layer, barrier layer conductive layer, dielectric layer, etc.

MEMS/Sensor

Insulation layer, diffusion barrier layer, water vapor barrier layer, hydrophobic/hydrophilic layer

Why Choose HCVAC ALD Coating Solutions

  • Flexible Customization Capabilities

    We offer tailored atomic layer deposition solutions and equipment configurations based on your specific needs

  • Turnkey Solutions

    We provide high-quality, stable, and reliable equipment, offering full support throughout the entire lifecycle, covering all aspects from design and installation to maintenance

  • Rich Expertise
    With 19 years of expertise in vacuum coating, we have honed deep technical knowledge to address the most challenging coating requirements with precision and efficiency

Custom ALD Solution For Your Business

If you are in the semiconductor, optics, MEMS, or photovoltaics field and need to deposit films on complex structures, ALD is your ideal solution. Our equipment offers precise control over film thickness, excellent uniformity, and conformal coating on high aspect ratio structures. Contact us today to explore how our ALD technology can meet your needs!

See lt in Action

Coating effect display

Coated / No coating

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We're pleased to solve your challenges and help you achieve your goals with our expertise

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