Thermal Evaporation Technology

The thermal evaporation deposition process supports the preparation of metal films such as copper, silver or gold, or films of other materials such as silicon dioxide and indium tin oxide. The process is also suitable for organic semiconductor substrate coating. Thermal evaporation deposition process is also used in the production of CIGS solar cells (co evaporation of Cu, in, GA, Se) and organic solar cells (monomer evaporation).

Thermal evaporation deposition, similar to sputtering deposition, is also a PVD (physical vapor deposition) film process. In the process, the plating material will be heated until evaporation (liquid) or sublimation (solid), and the resulting vapor particles will be deposited on the surface of the substrate and grow into a finished film.

Thermal evaporation, like most other PVD processes, is a high vacuum process, and reactive thermal evaporation process can also be realized: for example, the deposition performance of indium tin oxide can be improved by introducing ionized oxygen into the true cavity.