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---Low Friction Coefficient, Reduce Friction Loss
This machine has various DLC coating deposition technology with modular design. According to your needs, it can filter cathode arc, closed field magnetron sputtering, PACVD and ion source technology modules for DLC deposition machine, which are suitable for various scientific research, product development and mass production needs. It is widely used in machinery, electronics, optics, energy, decoration and other fields with advanced technology, convenient operation, less energy consumption, green environmental protection.
The DLC films developed by HCVAC has good adhesion, high hardness and wear resistance, low friction coefficient and low surface roughness. It can deposit DLC coating on various metal and alloy tools and parts. The unique low temperature coating technology can also be used to deposit DLC coating on high temperature resistant materials such as plastics.
Key Features of Diamond-like Carbon DLC Coating Machine
Small footprint, easy to integrate into the factory
Uniform deposition rate in the whole chamber
Easy to operate and maintain
Flexible combination of various technologies
Durable diamond-like carbon coating
Local or remote monitoring of coating process
DLC (Diamond-Like Carbon) coating offers high hardness, excellent friction and wear resistance, high thermal conductivity, a low dielectric constant, a wide band gap, good optical transparency, and outstanding chemical inertness and biocompatibility. It has broad application prospects in aerospace, mechanical, electronic, optical, decorative surface protection, biomedical fields, and more. DLC coatings are ideal for wear and sliding environments, as they reduce friction losses without requiring any lubricating medium. They are widely used in automotive engine components (such as fuel injection systems and power transmission systems), bearings, rollers, textile machinery, aerospace parts, and beyond.
DLC coatings produced by our DLC coating machines feature stable quality, strong adhesion to substrates, excellent wear resistance, low friction coefficients, and good corrosion resistance. They are commonly applied to engine parts, cutting tools for non-ferrous metals, forming and stamping dies for non-ferrous metals and stainless steel, sliding and sealing parts, semiconductor molds, injection molds, and components in the textile industry.
We tailor the design of our DLC coating machines based on different materials, industries, and application requirements to meet your specific needs.
DLC Coating Features:
Excellent self-lubricating performance for plastic processing.
Deposited film thickness: 1–3 μm; hardness: 2000–2500 HV.
Outstanding friction and wear resistance, high-temperature resistance up to 350 °C, and strong resistance to adhesive and abrasive wear.
Enables fast and predictable demolding, significantly improving quality and productivity—making it the first choice for PECVD-coated plastic parts.
The innovative APA evaporator technology (Advanced Plasma Assisted) is based on cathodic vacuum arc and offers diverse development possibilities for new layer architectures.
Benefits:
●High target utilisation result in low target costs
●High deposition rates
●Adjustable magnetic fields
●Short target changing times
●High plasma density
●Reduction of macro-particles
●Excellent coating adhesion
HiPIMS stands for High-Power Impulse Magnetron Sputtering.
Benefits:
●High ionisation rate (similar to arc)
●High power densities from 100 to 1000 W/cm2
●Very high plasma density
●Layer structures adjustable by plasma parameter settings
●Very smooth coatings
●Excellent coating adhesion
●Deposition of dense coatings at low substrate temperatures
In the sputtering process, atoms are extracted from a target by bombardment with high-energy ions (Ar) and transformed into the gas phase. By combining the sputtered material with additional gases, a coating is deposited on the substrate.
Benefits:
● A wide range of materials can be sputtered
● Diverse process variants available
● Smooth coatings
● Good coating adhesion on combination with power etching prozess AEGD
With the nitriding module, a plasma nitriding process can be performed before a PVD and/or PACVD coating process in one system and one batch. Thereby a hardened layer can be produced which offers excellent support for the subsequent PVD/PACVD coating.
Benefits:
● Optimisation of tool and component properties
● Substitution of expensive base materials
● Significantly longer lifetimes
● All PVD coatings can be applied
DLC stands for Diamond-Like Carbon and refers to a group of extremely low friction amorphous carbon coatings. With the DLC module, different DLC coatings can be produced by using PVD and/or PACVD processes. Standard DLC coatings consist of metal free or metal containing carbon coatings.
Benefits:
● Excellent coating adhesion
● High wear resistance
● Low coefficient of friction
● Smooth coatings
ta-C stands for tetrahedral amorphous carbon without hydrogen and refers to a group of extremely hard and low friction amorphous carbon coatings. With the ta-C module different ta-C coatings can be produced.
Benefits:
● For higher temperature environments than DLC
● Very high wear resistance
● Excellent coating adhesion
● Smooth coatings
| Mode | HCSH-400 |
| Usable Plasma Coating area | D400×H450mm |
| Max Working Temperature | 550℃ |
| Technology Characteristic | PMAⅡ AEG HIPIMS |
| Pretreatment | ARC, AEG, DC, MF, HIPIMS |
| Cathode | D120 / D160 / W125 |
| Ultimate Vacuum | Ultimate Vacuum ≤5×10-4Pa Work Vacuum ≤5×10-3Pa |
| Process Cycle | From closing to opening 4~5h TiN：2~2.5um TiAlN：2~2.5um TiSiN：2~3.5um |
| Machine Configuration | Magnetically Levitated Molecular Pump Pulse Bias Supply PC Intelligent Control System |
| Standard Shaft | D140×4 axis |
| Max Loading Capacity | 200KG |
| Remark | Adopt the sputtering(UBM, RF, etc.)，the effective height will be reduced Online Service Support System |
| Mode | HCSH-650 |
| Usable Plasma Coating area | D650×H750mm |
| Max Working Temperature | 550℃ |
| Technology Characteristic | PMAⅡ AEG HIPIMS |
| Pretreatment | ARC, AEG, DC, MF, HIPIMS |
| Cathode | D120 / D160 / W125 |
| Ultimate Vacuum | Ultimate Vacuum ≤5×10-4Pa Work Vacuum ≤5×10-3Pa |
| Process Cycle | From closing to opening 5~8h TiN：2~2.5um TiAlN：2~2.5um TiSiN：2~3.5um |
| Machine Configuration | Magnetically Levitated Molecular Pump Pulse Bias Supply PC Intelligent Control System |
| Standard Shaft | D140×8 axis |
| Max Loading Capacity | 500KG |
| emark | Adopt the sputtering(UBM, RF, etc.)，the effective height will be reduced Online Service Support System |
| Mode | HCSH-900 |
| Usable Plasma Coating area | D900×H1200mm |
| Max Working Temperature | 550℃ |
| Technology Characteristic | PMAⅡ AEG HIPIMS |
| Pretreatment | ARC, AEG, DC, MF, HIPIMS |
| Cathode | D120 / D160 / W125 |
| Ultimate Vacuum | Ultimate Vacuum ≤5×10-4Pa Work Vacuum ≤5×10-3Pa |
| Process Cycle | From closing to opening 7~10h TiN：2~2.5um TiAlN：2~2.5um TiSiN：2~3.5um |
| Machine Configuration | Magnetically Levitated Molecular Pump ×2 Pulse Bias Supply PC Intelligent Control System |
| Standard Shaft | D140×12 axis |
| Max Loading Capacity | 500KG |
| emark | Adopt the sputtering(UBM, RF, etc.)，the effective height will be reduced Online Service Support System |
| Mode | HCSH-1800 |
| Usable Plasma Coating area | D900×H1500mm |
| Max Working Temperature | 550℃ |
| Technology Characteristic | PMAⅡ AEG HIPIMS |
| Pretreatment | ARC, AEG, DC, MF, HIPIMS |
| Cathode | D120 / D160 / W125 |
| Ultimate Vacuum | Ultimate Vacuum ≤5×10-4Pa Work Vacuum ≤5×10-3Pa |
| Process Cycle | From closing to opening 7~10h TiN：2~2.5um TiAlN：2~2.5um TiSiN：2~3.5um |
| Machine Configuration | Magnetically Levitated Molecular Pump ×2 Pulse Bias Supply PC Intelligent Control System |
| Standard Shaft | D140×12 axis |
| Max Loading Capacity | 500KG |
| emark | Adopt the sputtering(UBM, RF, etc.)，the effective height will be reduced Online Service Support System |
Looking for a solution tailored to your needs? Our team is ready to provide you with expert guidance and support.
